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Sacrificial film-assisted nanoimprint lithography

โœ Scribed by Yongan Xu; Wei Zhao; Hong Y. Low

Book ID
108207545
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
399 KB
Volume
83
Category
Article
ISSN
0167-9317

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## Abstract **Summary:** Polyelectrolyte multilayer films of poly(acrylic acid) (PAA)/poly(allylamine hydrochloride) (PAH) and PAH/poly(sodium 4โ€styrenesulfonate) (PSS) based on electrostatic interactions as a driving force are patterned by roomโ€temperature nanoimprint lithography (RTโ€NIL). Under a