The Direct Patterning of Nanoporous Interlayer Dielectric Insulator Films by Nanoimprint Lithography

✍ Scribed by H. W. Ro; R. L. Jones; H. Peng; D. R. Hines; H.-J. Lee; E. K. Lin; A. Karim; D. Y. Yoon; D. W. Gidley; C. L. Soles

• Publisher: John Wiley and Sons
• Year: 2007
• Tongue: English
• Weight: 493 KB
• Volume: 19
• Category: Article
• ISSN: 0935-9648
• DOI: 10.1002/adma.200602872