Self-Sealing of Nanoporous Low Dielectric Constant Patterns Fabricated by Nanoimprint Lithography

✍ Scribed by Hyun Wook Ro; Huagen Peng; Ken-ichi Niihara; Hae-Jeong Lee; Eric K. Lin; Alamgir Karim; David W. Gidley; Hiroshi Jinnai; Do Y. Yoon; Christopher L. Soles

• Publisher: John Wiley and Sons
• Year: 2008
• Tongue: English
• Weight: 280 KB
• Volume: 20
• Category: Article
• ISSN: 0935-9648
• DOI: 10.1002/adma.200701994