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Laser pulse assisted nanoimprint lithography

✍ Scribed by V. Grigaliūnas; S. Tamulevičius; R. Tomašiūnas; V. Kopustinskas; A. Guobien≐; D. Jucius

Book ID: 113936577
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 260 KB
Volume: 453-454
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2003.11.071

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