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Maskless nonlinear lithography with femtosecond laser pulses

✍ Scribed by J. Koch; E. Fadeeva; M. Engelbrecht; C. Ruffert; H.H. Gatzen; A. Ostendorf; B.N. Chichkov


Publisher
Springer
Year
2005
Tongue
English
Weight
463 KB
Volume
82
Category
Article
ISSN
1432-0630

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