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Influence of PEN thermal properties on flexible film patterned by nanoimprint lithography

โœ Scribed by C. Gourgon; G. Philippot; S. Labau; J.H. Tortai; M. Benwadih; J. Bablet

Book ID
104052851
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
835 KB
Volume
88
Category
Article
ISSN
0167-9317

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In this paper, the relation between properties of metallic thin films and the formability for metal direct imprinting method is discussed. In order to obtain a better formability of thin films, aluminum thin films with different grain sizes were prepared first. Nanoindentation test was applied to me