Fabrication of nano-sized resist patterns on flexible plastic film using thermal curing nano-imprint lithography

✍ Scribed by Heon Lee; Sunghoon Hong; Kiyeon Yang; Kyungwoo Choi

• Book ID: 108207522
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 320 KB
• Volume: 83
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2005.09.006