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Rutherford backscattering studies of strain-relaxed SiGe films grown on Si substrate with compositionally graded buffer layers

✍ Scribed by Watanabe, Yoshinori; Oshima, Ryuji; Sakata, Isao; Matsubara, Koji; Sakamoto, Isao


Book ID
122749442
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
904 KB
Volume
378
Category
Article
ISSN
0022-0248

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