Characterization of epitaxial group II f
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Dr. R. Flagmeyer; Dr. B. Schumann
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Article
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1987
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John Wiley and Sons
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English
โ 539 KB
Lattice matched (Ca, Sr)F, and related fluoride films grown on (100)GaAs substrates were investigated by Rutherford backscattering/Channeling. This technique allows the characterization of the 30-250 nm thick heteroepitaxial layers with respect to chemical composition, film thickness, interface roug