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Rutherford backscattering and channeling analysis of epitaxial, low-mass films on high-mass substrates

โœ Scribed by I. Golecki


Publisher
Elsevier Science
Year
1983
Weight
287 KB
Volume
218
Category
Article
ISSN
0167-5087

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Characterization of epitaxial group II f
โœ Dr. R. Flagmeyer; Dr. B. Schumann ๐Ÿ“‚ Article ๐Ÿ“… 1987 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 539 KB

Lattice matched (Ca, Sr)F, and related fluoride films grown on (100)GaAs substrates were investigated by Rutherford backscattering/Channeling. This technique allows the characterization of the 30-250 nm thick heteroepitaxial layers with respect to chemical composition, film thickness, interface roug