Study on preparation of GaN and CoSi2 epitaxial films by mass analyzed low energy dual ion beam epitaxy

✍ Scribed by Zhen-yu Yao; Fu-guang Qin; Zhi-zhang Ren; Xiang-ming Wang; Zhi-kai Liu; Da-ding Huang; Lan-ying Lin; WM Lau

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 197 KB
• Volume: 43
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(92)90330-y