✦ LIBER ✦
The analysis of a thin SiO2/Si3N4/SiO2 stack: A comparative study of low-energy heavy ion elastic recoil detection, high-resolution Rutherford backscattering and secondary ion mass spectrometry
✍ Scribed by B. Brijs; T. Sajavaara; S. Giangrandi; T. Janssens; T. Conard; K. Arstila; K. Nakajima; K. Kimura; A. Bergmaier; G. Dollinger; A. Vantomme; W. Vandervorst
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 208 KB
- Volume
- 249
- Category
- Article
- ISSN
- 0168-583X
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