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Room temperature oxidation of magnetron sputtered Si–C–N films

✍ Scribed by E. Hüger; D. Gao; A. Markwitz; U. Geckle; M. Bruns; H. Schmidt

Book ID: 116244827
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 516 KB
Volume: 258
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2011.11.012

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