✦ LIBER ✦

Pulsed reactive magnetron sputtering of high-temperature Si–B–C–N films with high optical transparency

✍ Scribed by Vlček, J.; Calta, P.; Steidl, P.; Zeman, P.; Čerstvý, R.; Houška, J.; Kohout, J.

Book ID: 122601398
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 672 KB
Volume: 226
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2013.03.033

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Reactive magnetron sputtering of Si–C–N

Reactive magnetron sputtering of Si–C–N films with controlled mechanical and optical properties

✍ Vlček, Jaroslav; Kormunda, Martin; Čı́žek, Jiřı́; Soukup, Zbyněk; Peřina, Vratis 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 242 KB

Hard nanocrystalline Zr–B–C–N films with

Hard nanocrystalline Zr–B–C–N films with high electrical conductivity prepared by pulsed magnetron sputtering

✍ Vlček, J.; Steidl, P.; Kohout, J.; Čerstvý, R.; Zeman, P.; Prokšová, Š.; Peřina, 📂 Article 📅 2013 🏛 Elsevier Science 🌐 English ⚖ 711 KB

Effect of the gas mixture composition on

Effect of the gas mixture composition on high-temperature behavior of magnetron sputtered Si–B–C–N coatings

✍ J. Čapek; S. Hřeben; P. Zeman; J. Vlček; R. Čerstvý; J. Houška 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 542 KB

Achieving high free electron mobility in

Achieving high free electron mobility in ZnO:Al thin films grown by reactive pulsed magnetron sputtering

✍ Cornelius, S.; Vinnichenko, M.; Shevchenko, N.; Rogozin, A.; Kolitsch, A.; Molle 📂 Article 📅 2009 🏛 American Institute of Physics 🌐 English ⚖ 493 KB

Thermal conductivity of high-temperature

Thermal conductivity of high-temperature Si–B–C–N thin films

✍ Jamie J. Gengler; Jianjun Hu; John G. Jones; Andrey A. Voevodin; Petr Steidl; Ja 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 451 KB

Optical studies of AlN/n-Si(100) films o

Optical studies of AlN/n-Si(100) films obtained by the method of high-frequency magnetron sputtering

✍ N. S. Zayats; V. G. Boĭko; P. A. Gentsar; O. S. Litvin; V. P. Papusha; N. V. Sop 📂 Article 📅 2008 🏛 Springer 🌐 English ⚖ 290 KB