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Optical studies of AlN/n-Si(100) films obtained by the method of high-frequency magnetron sputtering

✍ Scribed by N. S. Zayats; V. G. Boĭko; P. A. Gentsar; O. S. Litvin; V. P. Papusha; N. V. Sopinskiĭ

Book ID
111443965
Publisher
Springer
Year
2008
Tongue
English
Weight
290 KB
Volume
42
Category
Article
ISSN
1063-7826

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Quaternary (Cr,Al)N-based nitride was synthesized from alloy targets by the radio-frequency magnetron sputtering method. The mole fractions of (Cr,Al,Y)N were 44 mol% CrN, 52 mol% AlN and 4 mol% YN, while those of (Cr,Al,Si)N was 49 mol% CrN, 47 mol% AlN, and 4 mol% SiN. As-deposited (Cr,Al,Y)N and