Achieving high free electron mobility in ZnO:Al thin films grown by reactive pulsed magnetron sputtering

✍ Scribed by Cornelius, S.; Vinnichenko, M.; Shevchenko, N.; Rogozin, A.; Kolitsch, A.; Moller, W.

• Book ID: 118221198
• Publisher: American Institute of Physics
• Year: 2009
• Tongue: English
• Weight: 493 KB
• Volume: 94
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.3074373