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Magnetron sputtering of Zr–Si–C thin films

✍ Scribed by Matilda Andersson; Sigita Urbonaite; Erik Lewin; Ulf Jansson

Book ID: 116943613
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 708 KB
Volume: 520
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2012.06.044

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