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Properties of dc magnetron sputtered indium tin oxide films on polymeric substrates at room temperature

✍ Scribed by Shin, J. H.; Shin, S. H.; Park, J. I.; Kim, H. H.

Book ID
121509175
Publisher
American Institute of Physics
Year
2001
Tongue
English
Weight
276 KB
Volume
89
Category
Article
ISSN
0021-8979

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Properties of dc magnetron sputtered ind
Properties of dc magnetron sputtered indium tin oxide films on polymeric substrates at room temperature
✍ Shin, J. H.; Shin, S. H.; Park, J. I.; Kim, H. H. πŸ“‚ Article πŸ“… 2001 πŸ› American Institute of Physics 🌐 English βš– 276 KB

Indium tin oxide (ITO) thin films were deposited on polymeric substrates at room temperature by dc reactive magnetron sputtering from an In–Sn (90–10 wt%) alloy target. The electrical, optical, and mechanical properties of ITO films on various substrates such as polycarbonate, acrylic, polyethylene