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Amorphous indium tin oxide films deposited on flexible substrates by facing target sputtering at room temperature

✍ Scribed by Xiao, Yu; Gao, Fangyuan; Dong, Guobo; Guo, Tingting; Liu, Qirong; Ye, Di; Diao, Xungang

Book ID
121532739
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
579 KB
Volume
556
Category
Article
ISSN
0040-6090

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Properties of dc magnetron sputtered ind
Properties of dc magnetron sputtered indium tin oxide films on polymeric substrates at room temperature
✍ Shin, J. H.; Shin, S. H.; Park, J. I.; Kim, H. H. πŸ“‚ Article πŸ“… 2001 πŸ› American Institute of Physics 🌐 English βš– 276 KB

Indium tin oxide (ITO) thin films were deposited on polymeric substrates at room temperature by dc reactive magnetron sputtering from an In–Sn (90–10 wt%) alloy target. The electrical, optical, and mechanical properties of ITO films on various substrates such as polycarbonate, acrylic, polyethylene