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Electrical and Structural Properties of Tin-Doped Indium Oxide Films Deposited by DC Sputtering at Room Temperature

✍ Scribed by Song, Pung Keun; Shigesato, Yuzo; Kamei, Masayuki; Yasui, Itaru


Book ID
125854435
Publisher
Institute of Pure and Applied Physics
Year
1999
Tongue
English
Weight
184 KB
Volume
38
Category
Article
ISSN
0021-4922

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Properties of dc magnetron sputtered ind
✍ Shin, J. H.; Shin, S. H.; Park, J. I.; Kim, H. H. πŸ“‚ Article πŸ“… 2001 πŸ› American Institute of Physics 🌐 English βš– 276 KB

Indium tin oxide (ITO) thin films were deposited on polymeric substrates at room temperature by dc reactive magnetron sputtering from an In–Sn (90–10 wt%) alloy target. The electrical, optical, and mechanical properties of ITO films on various substrates such as polycarbonate, acrylic, polyethylene