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Role of the rf frequency on the structure and composition of polymorphous silicon films

✍ Scribed by H. Águas; L. Raniero; L. Pereira; A.S. Viana; E. Fortunato; R. Martins


Book ID
116667694
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
434 KB
Volume
338-340
Category
Article
ISSN
0022-3093

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