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Composition and structure of hafnia films on silicon

✍ Scribed by T. P. Smirnova; V. V. Kaichev; L. V. Yakovkina; V. I. Kosyakov; S. A. Beloshapkin; F. A. Kuznetsov; M. S. Lebedev; V. A. Gritsenko

Book ID: 110166282
Publisher: SP MAIK Nauka/Interperiodica
Year: 2008
Tongue: English
Weight: 383 KB
Volume: 44
Category: Article
ISSN: 0020-1685
DOI: 10.1134/s0020168508090124

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