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Composition and properties of thin solid films on porous silicon surface

โœ Scribed by L. Monastyrskii; T. Lesiv; I. Olenych


Book ID
114086661
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
345 KB
Volume
343-344
Category
Article
ISSN
0040-6090

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Microhardness of porous silicon films an
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## by D.J. Lockwood) Microhardness measurements have been performed on porous silicon (Psi) films. The dependence of the hardness on porosity, morphology and the underlying silicon substrate has been established. A model which determines the intrinsic film hardness has been developed and experimen