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Luminescence properties of Bi-doped oxidized porous silicon thin films

โœ Scribed by Sa chu rong gui; Kenji Imakita; Minoru Fujii; Zhenhua Bai; Shinji Hayashi

Book ID
113832244
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
779 KB
Volume
34
Category
Article
ISSN
0925-3467

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Nd-and Er-doped silicon rich oxide (SRO) thin films were prepared by rf-sputtering. Different films were obtained by changing target configurations. Al and Al 2 O 3 targets were used to obtain along with silicon rich silicon oxide (SRSO) films, Al-modified SRSO films and silicon rich aluminosilicate