𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Effect of VB2RF Magnetron Sputtering Conditions on the Composition and Structure of Deposited Films

✍ Scribed by P. I. Ignatenko; D. N. Terpii; V. V. Petukhov; A. A. Goncharov

Book ID
110312484
Publisher
SP MAIK Nauka/Interperiodica
Year
2001
Tongue
English
Weight
165 KB
Volume
37
Category
Article
ISSN
0020-1685

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Structural evolution of ZnO films deposi
Structural evolution of ZnO films deposited by rf magnetron sputtering on glass substrate
✍ Liao, Yan-Ping ;Zhang, Jian-Hua ;Li, Shu-Xin ;Guo, Zhan-Sheng ;Cao, Jin ;Zhu, We πŸ“‚ Article πŸ“… 2010 πŸ› John Wiley and Sons 🌐 English βš– 520 KB

## Abstract Influences of O~2~/Ar flux ratio (__R__) on surface morphology and structural evolution have been studied in the case of ZnO films deposited on glass substrates by radio‐frequency (rf) magnetron sputtering. Results of atomic force microscopy (AFM), X‐ray diffraction, and X‐ray photoelec

Crystallographic structure and surface c
Crystallographic structure and surface composition of thin films grown by RF magnetron sputtering
✍ J.E. Alfonso; J. Buitrago; J. Torres; B. Santos; J.F. Marco πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 177 KB

In this work we report on the results obtained on NbN x thin films grown on both common glass and silicon wafer substrates by RF magnetron sputtering at different substrate temperatures and different target power supplies. The crystalinity, morphology and surface composition of the deposited films h