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Phase Composition of Films Deposited by ZrB2RF Magnetron Sputtering

✍ Scribed by P. I. Ignatenko; D. N. Terpii; A. A. Goncharov

Book ID: 110438257
Publisher: SP MAIK Nauka/Interperiodica
Year: 2003
Tongue: English
Weight: 121 KB
Volume: 39
Category: Article
ISSN: 0020-1685
DOI: 10.1023/a:1023612309261

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