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Role of rf power on the properties of undoped SnOx films deposited by rf-PERTE at low substrate temperature

โœ Scribed by J. Valente; G. Lavareda; O. Conde; P. Parreira; A. Amaral; C. Nunes de Carvalho

Book ID
108278407
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
354 KB
Volume
202
Category
Article
ISSN
0257-8972

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๐Ÿ“œ SIMILAR VOLUMES

Role of the oxygen partial pressure on t
Role of the oxygen partial pressure on the properties of undoped tin oxide films deposited at low temperature
โœ Parreira, P. ;Valente, J. ;Lavareda, G. ;Nunes de Carvalho, C. ;Ramos, A. R. ;Al ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 270 KB

## Abstract The aim of this work is to determine the influence of the oxygen partial pressure on the optical, electrical and structural properties of transparent and conductive undoped tin oxide (SnO__~x~__) thin films. These films were deposited by radio frequency plasma enhanced reactive thermal