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Influence of oxygen partial pressure on the properties of undoped InOx films deposited at room temperature by rf-PERTE

โœ Scribed by C. Nunes de Carvalho; G. Lavareda; P. Parreira; J. Valente; A. Amaral; A.M. Botelho do Rego


Book ID
116670964
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
158 KB
Volume
354
Category
Article
ISSN
0022-3093

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Role of the oxygen partial pressure on t
โœ Parreira, P. ;Valente, J. ;Lavareda, G. ;Nunes de Carvalho, C. ;Ramos, A. R. ;Al ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 270 KB

## Abstract The aim of this work is to determine the influence of the oxygen partial pressure on the optical, electrical and structural properties of transparent and conductive undoped tin oxide (SnO__~x~__) thin films. These films were deposited by radio frequency plasma enhanced reactive thermal