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Influence of oxygen gas content on the structural and optical properties of ZnO thin films deposited by RF magnetron sputtering at room temperature

โœ Scribed by Baoting Liu; Yang Zhou; Hongfang Zheng; Man Li; Zhe Guo; Qingxun Zhao; Yingcai Peng

Publisher
Nonferrous Metals Society of China
Year
2011
Tongue
English
Weight
867 KB
Volume
30
Category
Article
ISSN
1001-0521

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โœ Georgi P. Daniel; V.B. Justinvictor; Prabitha B. Nair; K. Joy; Peter Koshy; P.V. ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 339 KB

ZnO thin films were deposited on corning glass substrates by RF magnetron sputtering at room temperature. The dependence of crystal structure, morphology and optical properties on postdeposition annealing was investigated using XRD, AFM and UV-vis Spectrophotometer. The asdeposited films were amorph