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RHEED studies of the growth of Si(001) by gas source MBE from disilane

โœ Scribed by S.M. Mokler; W.K. Liu; N. Ohtani; B.A. Joyce


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
562 KB
Volume
120
Category
Article
ISSN
0022-0248

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