In-situ RHEED study on the effect of light irradiation on Ge/Si heteroepitaxial growth by GeH4 source MBE

✍ Scribed by Y. Koide; S. Zaima; K. Itoh; Y. Yasuda

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 518 KB
• Volume: 120
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(92)90404-7