RF MEMS and NEMS technology, devices, and applications
✍ Scribed by Peter Gammel; Georg Fischer; Jérémie Bouchaud
- Publisher
- Institute of Electrical and Electronics Engineers
- Year
- 2005
- Tongue
- English
- Weight
- 929 KB
- Volume
- 10
- Category
- Article
- ISSN
- 1089-7089
No coin nor oath required. For personal study only.
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RF MEMS tuners with wide impedance coverage have been developed for 6-24 GHz noise parameter and load-pull measurement systems. The tuners are based on triple-, double-, and single-stub topologies loaded with switched MEMS capacitors. Several designs are presented, and they use 10-13 switched MEMS c
## Special Issue on RF Applications of MEMS and Micromachining Micromachining is a new paradigm in IC fabrication that has spawned many new developments in a variety of electronic fields. Bulk and surface micromachining techniques are used to create miniature mechanical Ž . structures on an integra