Call for papers: Special issue on RF applications of MEMS and micromachining

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 25 KB
• Volume: 10
• Category: Article
• ISSN: 1096-4290
• DOI: 10.1002/(sici)1099-047x(200005)10:3<199::aid-mmce7>3.0.co;2-y

✦ Synopsis

Special Issue on RF Applications of MEMS and Micromachining

Micromachining is a new paradigm in IC fabrication that has spawned many new developments in a variety of electronic fields. Bulk and surface micromachining techniques are used to create miniature mechanical Ž . structures on an integrated circuit called MEMS microelectromechanical systems . Micromachining and MEMS have created a new generation of small, low power electronic devices, including pressure sensors, accelerometers, IR detectors; and also unique mechanical devices such as gears, wheels, and micromotors on an IC. Fabricating moving mechanical devices with the cost and reproducibility advantages afforded by batch IC processes offers an exciting twist to the established methods for fabricating ICs.