Call for papers: Special issue on RF app
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Article
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2000
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John Wiley and Sons
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English
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## Special Issue on RF Applications of MEMS and Micromachining Micromachining is a new paradigm in IC fabrication that has spawned many new developments in a variety of electronic fields. Bulk and surface micromachining techniques are used to create miniature mechanical ลฝ . structures on an integra