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RF MEMS impedance tuners for 6–24 GHz applications

✍ Scribed by Tauno Vähä-Heikkilä; Koen Van Caekenberghe; Jussi Varis; Jussi Tuovinen; Gabriel M. Rebeiz

Publisher
John Wiley and Sons
Year
2007
Tongue
English
Weight
570 KB
Volume
17
Category
Article
ISSN
1096-4290

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✦ Synopsis

RF MEMS tuners with wide impedance coverage have been developed for 6-24 GHz noise parameter and load-pull measurement systems. The tuners are based on triple-, double-, and single-stub topologies loaded with switched MEMS capacitors. Several designs are presented, and they use 10-13 switched MEMS capacitors to produce 1024-8192 (2 10 -2 13 ) different impedances. The measured impedance coverage agrees well with simulations and it is the widest ever measured impedance coverage from any planar tuner to-date. V

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