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Residual stress measurements in hexagonal zinc films from X-ray peak shift analysis


Book ID
108389863
Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
162 KB
Volume
28
Category
Article
ISSN
0042-207X

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Piezoelectric thin films on high acoustic velocity non piezoelectric substrates, such as ZnO and AlN, deposited on diamond or sapphire substrates, are attractive for high frequency and low-loss surface acoustic wave devices. In this work, ZnO films were epitaxialy grown on R-Al 2 O 3 and C-Al 2 O 3