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Relationship between electron sensitivity and chemical structures of polymers as electron beam resists. VI: Electron sensitivity of various acetalized poly(vinyl alcohol)s

✍ Scribed by Kiyoshi Oguchi; Kohei Sanui; Naoya Ogata; Yoichi Takahashi; Tomihiro Nakada

Publisher
Society for Plastic Engineers
Year
1989
Tongue
English
Weight
478 KB
Volume
29
Category
Article
ISSN
0032-3888

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