Relationship between electron sensitivity and chemical structures of polymers as EB resists. III. Electron sensitivity of various polyamides using 3-amino perhydroazepine

Relationship between electron sensitivit

Relationship between electron sensitivity and chemical structure of polymers as EB resists. I. Electron sensitivity of various polyamides

✍ Naoya Ogata; Kohei Sanui; Chiaki Azuma; Hozumi Tanaka; Kiyoshi Oguchi; Tomihiro 📂 Article 📅 1983 🏛 John Wiley and Sons 🌐 English ⚖ 693 KB

## Abstract Polyamides containing double bonds or epoxy groups were synthesized and evaluated as electron beam (EB) resists, in order to find the relationship between electron beam sensitivity and chemical structure of the polyamides. It was found that polyamides containing double bonds, which have