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Relationship between electron sensitivity and chemical structures of polymers as EB resists: Poly(lactam thioether) as new positive EB resists

✍ Scribed by Kiyoshi Oguchi; Sachiko Yoneyama; Kohei Sanui; Naoya Ogata; Yoichi Takahashi; Tomihiro Nakada

Publisher
Society for Plastic Engineers
Year
1986
Tongue
English
Weight
666 KB
Volume
26
Category
Article
ISSN
0032-3888

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