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Reduction of silicon dioxide by aluminum in metalâoxideâsemiconductor structures

✍ Scribed by Dadabhai, Ferhad; Gaspari, Franco; Zukotynski, Stefan; Bland, Colby

Book ID: 120367083
Publisher: American Institute of Physics
Year: 1996
Tongue: English
Weight: 277 KB
Volume: 80
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.363669

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