✦ LIBER ✦

Reduction of amorphous incubation layer by HCl addition during deposition of microcrystalline silicon by hot-wire chemical vapor deposition

✍ Scribed by Yung-Bin Chung; Dong-Kwon Lee; Jong-Sung Lim; Nong-Moon Hwang

No coin nor oath required. For personal study only.

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