✦ LIBER ✦

In-line deposition of silicon-based films by hot-wire chemical vapor deposition

✍ Scribed by Schäfer, Lothar; Harig, Tino; Höfer, Markus; Laukart, Artur; Borchert, Dietmar; Keipert-Colberg, Sinje; Trube, Jutta

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Processes in silicon deposition by hot-w

✍ P.A.T.T van Veenendaal; R.E.I Schropp 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 178 KB

Ultrafast deposition of silicon nitride

✍ R.E.I. Schropp; C.H.M. van der Werf; V. Verlaan; J.K. Rath; H. Li 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 403 KB

Microcrystalline silicon films fabricate

✍ Zhang, Lei; Shen, Honglie; You, Jiayi; Jiang, Xuefan; Qian, Bin; Han, Zhida 📂 Article 📅 2013 🏛 Springer US 🌐 English ⚖ 358 KB

Stress measurements in polycrystalline s

✍ D. Peiró; J. Bertomeu; F. Arrando; J. Andreu 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 423 KB

Clustered defects in hot wire chemical v

✍ J.K Rath; A Barbon; R.E.I Schropp 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 155 KB

Mobility-lifetime product in microdoped

✍ J.P Conde; R Castanha; P Brogueira; V Chu 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 112 KB