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Redistribution of implanted and thermally predeposited dopants during high pressure oxidation

โœ Scribed by Fischer, A. ;Knoll, D. ;Grabolla, T. ;Fischer, F.


Book ID
105379496
Publisher
John Wiley and Sons
Year
1986
Tongue
English
Weight
167 KB
Volume
97
Category
Article
ISSN
0031-8965

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