Determination of stresses in thermal oxi
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P. Poole; L.L. Shreir
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Article
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1968
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Elsevier Science
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English
โ 520 KB
The magnitude of the stress in thin oxide lilms on Cu and Fe has been determined using a sensitive stressometer and measuring the relaxation of stress during electrometric reduction of the oxide. The method has the advantage that both the stress and thickness of oxide can be measured simultaneously.