Thermal effects during the deposition of thin silver, gold and copper films and their influence on internal stress measurements

✍ Scribed by R. Abermann; H.P. Martinz; R. Kramer

• Publisher: Elsevier Science
• Year: 1980
• Tongue: English
• Weight: 597 KB
• Volume: 70
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(80)90420-4