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Real time ellipsometry for monitoring plasma-assisted epitaxial growth of GaN

✍ Scribed by Giovanni Bruno; Maria Losurdo; Maria M. Giangregorio; Pio Capezzuto; April S. Brown; Tong-Ho Kim; Soojeong Choi

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 700 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2006.05.129

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