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Spectroscopic Ellipsometry in-situ Monitoring/Control of GaN Epitaxial Growth in MBE and MOVPE

✍ Scribed by Yoshikawa, A. ;Xu, K. ;Taniyasu, Y. ;Takahashi, K.

Publisher: John Wiley and Sons
Year: 2002
Tongue: English
Weight: 322 KB
Volume: 190
Category: Article
ISSN: 0031-8965
DOI: 10.1002/1521-396x(200203)190:1<33::aid-pssa33>3.0.co;2-i

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