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Reactor modeling of magnetically enhanced capacitive RF discharge

✍ Scribed by Jong-Chul Park; Bongkoo Kang

Book ID: 117862912
Publisher: IEEE
Year: 1997
Tongue: English
Weight: 290 KB
Volume: 25
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.597265

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