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Characteristics of molecular hydrogen and CH* radicals in a methane plasma in a magnetically enhanced capacitive RF discharge

✍ Scribed by S. V. Avtaeva; T. M. Lapochkina

Book ID
111442906
Publisher
SP MAIK Nauka/Interperiodica
Year
2007
Tongue
English
Weight
319 KB
Volume
33
Category
Article
ISSN
1063-780X

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