Mass spectroscopic investigation of the CH3 radicals in a methane rf discharge
โ Scribed by Toyoda, H.; Kojima, H.; Sugai, H.
- Book ID
- 120189195
- Publisher
- American Institute of Physics
- Year
- 1989
- Tongue
- English
- Weight
- 559 KB
- Volume
- 54
- Category
- Article
- ISSN
- 0003-6951
- DOI
- 10.1063/1.101336
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