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Observation of CH2 radical and comparison with CH3 radical in a rf methane discharge

✍ Scribed by Kojima, H.; Toyoda, H.; Sugai, H.

Book ID: 126911941
Publisher: American Institute of Physics
Year: 1989
Tongue: English
Weight: 551 KB
Volume: 55
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.101636

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